White paper : AI-enabled integrated nanophotonics at the NRC : design, fabrication, and optical metrology / Dan-Xia Xu, Yuri Grinberg.: NR16-501/2026E-PDF

"This document presents recent advances by the National Research Council of Canada (NRC) team and collaborators in AI-enabled photonics, organized around three interconnected pillars: design, fabrication, and metrology. These efforts have been supported by the NRC AI for Design (AI4D) Challenge Program and the High Throughput and Secure Networks (HTSN) Challenge Program. Together, these developments illustrate how machine learning can accelerate device optimization, improve robustness to fabrication variability, and enable more reliable translation from concept to practical implementation. Although the work presented here focuses primarily on silicon photonics, a leading platform for integrated photonics, the underlying methodologies are platform-agnostic. They provide a foundation that can be extended to a broader range of material systems, including III–V compound semiconductors and heterogeneous integration platforms, supporting future photonic technologies across diverse applications"--Introduction, pages 4-5.

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